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Patterned Sapphire Substrate(PSS)

Specific Information
GaN epi-layer grown on PSS produces epitaxial lateral and less interstitial defects between GaN and sapphire substrates.Moreover the lattice parameters of PSS are better matched to GaN and the epitaxial growth of GaN on PSS generates less densities of dislocations and refractive index mismatch,thereby improving the quality of epitaxy.
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  • specification
  • Properties
  •                           
     
    Item Patterned Sapphire Substrate(2~6inch)
    Diameter 50.8 ± 0.1 mm 100.0 ± 0.2 mm 150.0 ± 0.3 mm
    Thickness 430 ± 25μm 650 ± 25μm 1000 ± 25μm
    Surface Orientation C-plane (0001) off-angle toward M-axis (10-10) 0.2 ± 0.1°
    C-plane (0001) off-angle toward A-axis (11-20) 0 ± 0.1°
    Primary Flat Orientation A-Plane (11-20) ± 1.0°
    Primary Flat Length 16.0 ± 1.0 mm 30.0 ± 1.0 mm 47.5 ± 2.0 mm
    R-Plane 9-o'clock
    Front Surface Finish Patterned
    Back Surface Finish SSP:Fine-ground,Ra=0.8-1.2um; DSP:Epi-polished,Ra<0.3nm
    Laser Mark Back side
    TTV ≤8μm ≤10μm ≤20μm
    BOW ≤10μm ≤15μm ≤25μm
    WARP ≤12μm ≤20μm ≤30μm
    Edge Exclusion ≤2 mm
    Pattern Specification Shape Structure Dome, Cone,Pyramid
    Pattern Height 1.6~1.8μm
    Pattern Diameter 2.75~2.85μm
    Pattern Space 0.1~0.3μm
  • Customization specifications:

    * Nanometer patterned sapphire substrate(NPSS).

    * Sapphire PSS of various orientations.

    Patterned sapphire substrate(PSS) is a process of making some specific micrometer pattern like Dome,Cone or Pyramid-shaped on the sapphire substrate.Uneven patterns on sapphire substrates can generate light scattering or refraction,thereby improving the luminous efficiency. 

     

    Crystal Structure Hexagonal
    Lattice Constant(nm) a=4.76Å c=12.99Å
    Density(g/cm3) 3.98
    Melting point(℃) 2040
    Mohs Hardness(mohs) 9
    Dielectric Constant 9.3(A plane) 11.5(C plane)
    Thermal Conductivity(W/cm.K) 0.46
    Thermal Expansion  6.7*10-6/k(C plane)             5.0*10-6/k(A plane)
    Refractive Index  1.762-1.777
    Transmission  Test sample:Sapphire:D76.2*4mm
    UV:200~380nm  74%~84%
    Visible light:380~760nm  85% 
    Infrared:760~1000nm      85%
    Far-Infrared:>1000nm   80%~100%

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